In-situ Control of Nitrogen Content and the Effect on PL...

MRS Proceedings 2004 / 1 Vol. 817

In-situ Control of Nitrogen Content and the Effect on PL Properties of SiNx Films Grown by Ion Beam Sputter Deposition

Kim, Kyung Joong, Moon, Dae Won, Yang, Moon-Seung, Shin, Jung H.
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Volume:
817
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-817-L4.2
Date:
January, 2004
File:
PDF, 151 KB
english, 2004
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