Structural and optoelectronic properties of doped microcrystalline silicon carbide films
Demichelis, F, Crovini, G, Pirri, C F, Tresso, E, Fanclulli, M, Piesarkiewicz, T, Stapinski, TVolume:
9
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/9/8/017
Date:
August, 1994
File:
PDF, 596 KB
english, 1994