Fracture Mechanisms of SiNx Thin-films on Compliant...

MRS Proceedings 2008 / 1 Vol. 1078

Fracture Mechanisms of SiNx Thin-films on Compliant Substrates

Kattamis, Alex Z, Cherenack, Kunigunde H, Cheng, I-Chun, Long, Ke, Sturm, James C, Wagner, Sigurd
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Volume:
1078
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1078-M14-02
Date:
January, 2008
File:
PDF, 1.76 MB
english, 2008
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