Impact of EBAS annealing on sheet resistance reduction for Al-implanted 4H-SiC(0001)
Shibagaki, Masami, Egami, Akihiro, Kumagai, Akira, Numajiri, Kenji, Watanabe, Fumio, Haga, Shigetaka, Miura, Kuniaki, Miyagawa, Shingo, Kudoh, Naohiro, Suzuki, Tomoyuki, Satoh, MasatakaVolume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B11-02
Date:
January, 2006
File:
PDF, 221 KB
english, 2006