PECVD Synthesis of Silicon Carbonitride Layers Using...

ECS Journal of Solid State Science and Technology 2014 / 11 Vol. 4; Iss. 1

PECVD Synthesis of Silicon Carbonitride Layers Using Methyltris(diethylamino)silane as the New Single-Source Precursor

Fainer, N. I., Plekhanov, A. G., Golubenko, A. N., Rumyantsev, Y. M., Rakhlin, V. I., Maximovski, E. A., Shayapov, V. R.
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Volume:
4
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0201501jss
Date:
November, 2014
File:
PDF, 1.54 MB
english, 2014
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