ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Practical Method and Physics of Evaluation for Vacancy Concentration of Silicon Crystals by Measuring Low-Temperature Elastic Softening
Yamada-Kaneta, Hiroshi, Baba, Shotaro, Nagai, Yuta, Akatsu, Mitsuhiro, Mitsumoto, Keisuke, Yanase, Takashi, Okabe, Kazuki, Ono, Yasushi, Nemoto, Yuichi, Goto, TerutakaYear:
2010
Language:
english
DOI:
10.1149/1.3485683
File:
PDF, 721 KB
english, 2010