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Growth Mechanism and Dislocation Characterization of Silicon Carbide Epitaxial Films
Dhanaraj, Govindhan, Chen, Yi, Chen, Hui, Vetter, William M, Zhang, Hui, Dudley, MichaelVolume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B05-27
Date:
January, 2006
File:
PDF, 525 KB
english, 2006