Stamp design effect on 100 nm feature size for 8 inch NanoImprint lithography
Landis, S, Chaix, N, Gourgon, C, Perret, C, Leveder, TVolume:
17
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/17/10/043
Date:
May, 2006
File:
PDF, 1.63 MB
english, 2006