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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Precision laser annealing of silicon devices for enhanced electro-optic performance
Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Bender, Daniel A., DeRose, Christopher T., Starbuck, Andrew, Verley, Jason C., Jenkins, Mark W.Volume:
8967
Year:
2014
Language:
english
DOI:
10.1117/12.2037339
File:
PDF, 1.89 MB
english, 2014