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Microstructural and Geometrical Factors Influencing the Mechanical Failure of Polysilicon for MEMS
Jonnalagadda, Krishna, Chasiotis, IoannisVolume:
1052
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1052-DD02-01
Date:
January, 2007
File:
PDF, 1.18 MB
english, 2007