Deep-Level Defects in High-Dose Proton Implanted and...

ECS Transactions 2014 / 08 Vol. 64; Iss. 11

Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon

Jelinek, M., Laven, J., Rommel, M., Schustereder, W., Schulze, H.-J., Frey, L., Job, R.
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Volume:
64
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06411.0173ecst
Date:
August, 2014
File:
PDF, 1.02 MB
english, 2014
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