Planarization Efficiency of Electrochemical Mechanical...

Journal of The Electrochemical Society 2006 Vol. 153; Iss. 3

Planarization Efficiency of Electrochemical Mechanical Deposition and Its Dependence on Process Parameters

Başol, Bülent M., Erdemli, Serkan, Uzoh, Cyprian E., Wang, Tony
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2162460
File:
PDF, 207 KB
english, 2006
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