Contamination Control in Supercritical CO2 Drying Process for Nano-Scale Memory Manufacturing
Hayashi, H., Okuchi, H., Tomita, H., Ono, Y., Nakamori, T., Sugawara, H.Volume:
58
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05806.0197ecst
Date:
August, 2013
File:
PDF, 380 KB
english, 2013