Effects of Local Texture and Grain Structure on the...

Materials Science Forum 2002 Vol. 408-412

Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

Michaluk, Christopher A., Field, David P., Nibur, Kevin A., Wright, Stuart I., Witt, Ronald A.
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Volume:
408-412
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.408-412.1615
File:
PDF, 552 KB
2002
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