Selective and controllable lateral photoelectrochemical etching of nonpolar and semipolar InGaN/GaN multiple quantum well active regions
Megalini, Ludovico, Kuritzky, Leah Y., Leonard, John T., Shenoy, Renuka, Rose, Kenneth, Nakamura, Shuji, Speck, James S., Cohen, Daniel A., DenBaars, Steven P.Volume:
8
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.8.066502
Date:
June, 2015
File:
PDF, 936 KB
english, 2015