Nitridation of Hafnium Silicate Thin Films
Chatham, Hood, Senzaki, Yoshi, Bailey, Jeff, Nieveen, WesleyVolume:
811
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-811-D7.5
Date:
January, 2004
File:
PDF, 202 KB
english, 2004