Surface Modification of Silicon Nano Mechanical Structures...

MRS Proceedings 2005 / 1 Vol. 908

Surface Modification of Silicon Nano Mechanical Structures by Carbon Ion Implantation for Post-fabrication Transformation to Silicon Carbide

Virwani, Kumar R, Sood, Dinesh K, Elliman, Robert G, Malshe, Ajay P
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
908
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0908-OO16-03
Date:
January, 2005
File:
PDF, 601 KB
english, 2005
Conversion to is in progress
Conversion to is failed