Growth and Integration of High-Density CNT for BEOL...

MRS Proceedings 2008 / 1 Vol. 1079

Growth and Integration of High-Density CNT for BEOL Interconnects

Negreira, Ainhoa Romo, Cott, Daire J., Verhulst, Anne S., Esconjauregui, Santiago, Chiodarelli, Nicolo′, Ek Weis, Johan, Whelan, Caroline M., Groeseneken, Guido, Heyns, Marc, De Gendt, Stefan, Vereeck
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Volume:
1079
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1079-N06-01
Date:
January, 2008
File:
PDF, 3.77 MB
english, 2008
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