Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2000 Vol. 18; Iss. 1
![](/img/cover-not-exists.png)
Organic/SiO[sub 2] chemical vapor deposited nanocomposites as templates for nanoporous silica
Senkevich, Jay J.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591188
File:
PDF, 415 KB
english, 2000