Wide-spectral-range, Expanded-beam Spectroscopic...

MRS Proceedings 2011 / 1 Vol. 1321

Wide-spectral-range, Expanded-beam Spectroscopic Ellipsometer and its Application for Imaging/Mapping of Graded Nanocrystalline Si:H Films

Nemeth, A., Attygalle, D., Dahal, L. R., Aryal, P., Huang, Z., Salupo, C., Petrik, P., Juhasz, G., Major, C., Polgar, O., Fried, M., Pecz, B., Collins, R. W.
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Volume:
1321
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1115
Date:
January, 2011
File:
PDF, 301 KB
english, 2011
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