Surface Roughness Analysis on Reactive Ion Etched Aluminium...

Surface Roughness Analysis on Reactive Ion Etched Aluminium Deposited Wafer

Sauli, Zaliman, Retnasamy, Vithyacharan, Yeow, Aaron Koay Terr
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
487
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.487.141
Date:
January, 2014
File:
PDF, 338 KB
english, 2014
Conversion to is in progress
Conversion to is failed