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Conditions for the Formation of Ring-Like Distributed Stacking Faults in CZ-Si Wafers
Kissinger, Gudrun, Vanhellemont, Jan, Lambert, Ulrich, Gräf, Dieter, Grabolla, Thomas, Richter, HansVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L306
Date:
March, 1998
File:
PDF, 90 KB
english, 1998