The Mechanical Property of TiN Film Deposited on...

Key Engineering Materials 2005 Vol. 297-300

The Mechanical Property of TiN Film Deposited on N+-Implanted Aluminum by Magnetron Sputtering

Cai, Xun, Liu, Youming, Li, Liuhe, Chen, Qiu Long, Hu, Yawei
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
297-300
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.297-300.1713
File:
PDF, 527 KB
english, 2005
Conversion to is in progress
Conversion to is failed