Stress Liner Proximity Technique to Enhance Carrier...

MRS Proceedings 2009 / 1 Vol. 1194

Stress Liner Proximity Technique to Enhance Carrier Mobility in High-κ Metal Gate MOSFETs

Guo, Dechao, Schonenberg, Kathryn, Chen, Jie, Jaeger, Daniel, Kulkarni, Pranita, Kwon, Unoh, Liang, Yue, Liu, Joyce, Song, Liyang, Arnaud, Franck, Bu, Huiming, Chudzik, Michael, Henson, William K, Old
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Volume:
1194
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1194-A04-02
Date:
January, 2009
File:
PDF, 310 KB
english, 2009
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