Benefits and Trade-offs in Multi-Level Air Gap Integration

MRS Proceedings 2006 / 1 Vol. 914

Benefits and Trade-offs in Multi-Level Air Gap Integration

Hoofman, Romano, Daamen, Roel, Nguyenhoang, Viet, Michelon, Julien, Gosset, Laurent G., Arnal, Vincent, de Pontcharra, Jean, Gaillard, Frederic, Caluwaerts, Rudy, Bruynseraede, Christophe, Beyer, Gera
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Volume:
914
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0914-F10-01
Date:
January, 2006
File:
PDF, 2.69 MB
english, 2006
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