ECS Transactions [ECS 219th ECS Meeting - Montreal, QC,...

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ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Global and Local Stress Characterization of SiN/Si(100) Wafers Using Optical Surface Profilometer and Multiwavelength Raman Spectroscopy

Yoo, Woo Sik, Kajiwara, Junya, Ueda, Takeshi, Ishigaki, Toshikazu, Kang, Kitaek
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Year:
2011
Language:
english
DOI:
10.1149/1.3572324
File:
PDF, 1.52 MB
english, 2011
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