Optical and Spectroscopic Ellipsometric Study of Indium Boron Nitride Sputtered Thin Films with Low Boron Concentration
Ebdah, Mohammad A., Kordesch, Martin E., Ingram, David C., AlBrithen, Hamad, Ibdah, Abdel-Rahman A., Cooper, KevinVolume:
1307
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.700
Date:
January, 2011
File:
PDF, 1.08 MB
english, 2011