Optical and Spectroscopic Ellipsometric Study of Indium...

Optical and Spectroscopic Ellipsometric Study of Indium Boron Nitride Sputtered Thin Films with Low Boron Concentration

Ebdah, Mohammad A., Kordesch, Martin E., Ingram, David C., AlBrithen, Hamad, Ibdah, Abdel-Rahman A., Cooper, Kevin
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Volume:
1307
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.700
Date:
January, 2011
File:
PDF, 1.08 MB
english, 2011
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