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Introduction of a Dynamic Corrosion Inhibitor for Copper Interconnect Cleaning
Otake, Atsushi, Kuroda, Akira, Luo, Roger, Bernatis, Paul R.Volume:
195
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.195.124
Date:
December, 2012
File:
PDF, 330 KB
english, 2012