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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Nano- and Micro-Optics for Information Systems - Nano-optical elements fabricated by e-beam and x-ray lithography
Di Fabrizio, Enzo M., Cojoc, Dan, Cabrini, Stefano, Businaro, Luca, Altissimo, Matteo, Vaccari, Lisa, Romanato, Filippo, Malureanu, Radu, Kaulich, Burkhard, Wilhein, Thomas, Susini, Jean, Eldada, LouaVolume:
5225
Year:
2003
Language:
english
DOI:
10.1117/12.507880
File:
PDF, 1.67 MB
english, 2003