Correlation Between Annealing Temperature and Crystallinity...

Correlation Between Annealing Temperature and Crystallinity of Si Films Prepared by Thermal Plasma Jet Crystallization Technique

Kaku, Hirotaka, Higashi, Seiichiro, Okada, Tatsuya, Murakami, Hideki, Miyazaki, Seiichi
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Volume:
910
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0910-A21-18
Date:
January, 2006
File:
PDF, 243 KB
english, 2006
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