Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films for Thin-Film Optical Waveguides
Homma, Tetsuya, Ariyama, Yuhji, Kondo, Hiroyasu, Sakamoto, Masaya, Kanegae, Shigeru, Itoh, Masahiro, Yamaguchi, Masaki, Takahashi, HideoVolume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393326
File:
PDF, 262 KB
english, 2000