SONOS memory devices with ion beam modified nitride layers

MRS Proceedings 2012 / 1 Vol. 1430

SONOS memory devices with ion beam modified nitride layers

Simatos, D., Dimitrakis, P., Ioannou-Sougleridis, V., Normand, P., Giannakopoulos, K., Pecassou, B., BenAssayag, G.
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Volume:
1430
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1019
Date:
January, 2012
File:
PDF, 608 KB
english, 2012
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