![](/img/cover-not-exists.png)
Low Temperature Synthesis of Nanocrystalline Silicon and Silicon Oxide Films by Plasma Chemical Vapor Deposition
Tomyo, Atsushi, Kaki, Hirokazu, Takahashi, Eiji, Hayashi, Tsukasa, Ogata, Kiyoshi, Uraoka, YukiharuVolume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A06-10
Date:
January, 2008
File:
PDF, 552 KB
english, 2008