Controlling Crystallization Structures in Thin Si Film for...

MRS Proceedings 2012 / 1 Vol. 1427

Controlling Crystallization Structures in Thin Si Film for Improving Characteristics of MEMS Resonators

Kumagai, Shinya, Murase, Hiromu, Tomikawa, Takashi, Ogawa, Syohei, Yamashita, Ichiro, Uraoka, Yukiharu, Sasaki, Minoru
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Volume:
1427
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1418
Date:
January, 2012
File:
PDF, 10.10 MB
english, 2012
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