SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco,...

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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] MOEMS and Miniaturized Systems IX - Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics

Tauscher, Jason, Schenk, Harald, Piyawattanametha, Wibool, Davis, Wyatt O., Brown, Dean, Ellis, Matt, Ma, Yunfei, Sherwood, Michael E., Bowman, David, Helsel, Mark P., Lee, Sung, Coy, John Wyatt
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Volume:
7594
Year:
2010
Language:
english
DOI:
10.1117/12.843095
File:
PDF, 1.21 MB
english, 2010
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