Fabrication and Electronic Characteristics of Silicon Nanowire MOSFETs
Yoshioka, Hironori, Nanen, Yuichiro, Suda, Jun, Kimoto, TsunenobuVolume:
1080
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1080-O12-02
Date:
January, 2008
File:
PDF, 574 KB
english, 2008