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Mechanical strength of anchor–microbeam combined structure fabricated by silicon-on-glass process
Yang, Fang, Zhang, Li, Wang, Wei, He, Jun, Zhao, Danqi, Zhang, Dacheng, Huang, XianVolume:
9
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2014.0251
Date:
October, 2014
File:
PDF, 453 KB
english, 2014