Doping of Sub-50nm SOI Layers

MRS Proceedings 2008 / 1 Vol. 1070

Doping of Sub-50nm SOI Layers

Pawlak, Bartek J., Duffy, Ray, van Dal, Mark, Voogt, Frans, Weemaes, Robbert, Roozeboom, Fred, Zalm, Peer, Bennett, Nick, Cowern, Nick
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Volume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E04-06
Date:
January, 2008
File:
PDF, 541 KB
english, 2008
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