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Deposition of Amorphous Carbon Thin Films via Bias Assisted Pyrolysis-CVD
Ishak, A., Mamat, Mohamad Hafiz, Mohammad Rusop, MahmoodVolume:
667
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.667.172
Date:
March, 2013
File:
PDF, 542 KB
english, 2013