Improved Observation Contrast of Block-Copolymer Nanodot...

Key Engineering Materials 2013 / 1 Vol. 534

Improved Observation Contrast of Block-Copolymer Nanodot Pattern Using Carbon Hard Mask (CHM)

Akahane, Takashi, Komori, Takuya, Liu, Jing, Huda, Miftakhul, Bin Mohamad, Zulfakri, Yin, You, Hosaka, Sumio
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Volume:
534
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.534.126
Date:
January, 2013
File:
PDF, 818 KB
english, 2013
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