Fabrication of Surface Nitridation Mask on GaAs Substrate for Nano-Lithography
Yamamoto, Yo, Saito, Kohji, Kondo, Toshiyuki, Maruyama, Takahiro, Naritsuka, ShigeyaVolume:
843
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-843-T3.5
Date:
January, 2004
File:
PDF, 313 KB
english, 2004