Fabrication of Surface Nitridation Mask on GaAs Substrate...

Fabrication of Surface Nitridation Mask on GaAs Substrate for Nano-Lithography

Yamamoto, Yo, Saito, Kohji, Kondo, Toshiyuki, Maruyama, Takahiro, Naritsuka, Shigeya
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Volume:
843
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-843-T3.5
Date:
January, 2004
File:
PDF, 313 KB
english, 2004
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