Dielectric Properties of Ultra Dense (3 g/cm3) Silicon...

MRS Proceedings 2007 / 1 Vol. 989

Dielectric Properties of Ultra Dense (3 g/cm3) Silicon Nitride Deposited by Hot Wire CVD at Industrially Relevant High Deposition Rates

Houweling, Zomer Silvester, Verlaan, Vasco, van der Werf, Karine, Goldbach, Hanno D., Schropp, Ruud E I
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Volume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A04-05
Date:
January, 2007
File:
PDF, 155 KB
english, 2007
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