![](/img/cover-not-exists.png)
Monte Carlo simulations of the transport of sputtered particles
Karol Macàk, Peter Macàk, Ulf HelmerssonVolume:
120
Year:
1999
Language:
english
Pages:
17
DOI:
10.1016/s0010-4655(99)00245-3
File:
PDF, 1.07 MB
english, 1999