An Experimental Study of Properties of Ultrathin Si Layer with Bonded Si/SiO2 Interface
Naumova, O.V., Fomin, B., Popov, V.P., Strelchuk, Victor, Nikolenko, A., Nazarov, A.N.Volume:
854
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.854.3
Date:
November, 2013
File:
PDF, 1.37 MB
english, 2013