Ion-Beam Enhanced Stress-Relaxation of SiGe on SiO2

MRS Proceedings 2005 / 1 Vol. 908

Ion-Beam Enhanced Stress-Relaxation of SiGe on SiO2

Tanaka, Masanori, Sadoh, Taizoh, Ninomiya, Masaharu, Nakamae, Masahiko, Enokida, Toyotsugu, Miyao, Masanobu
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Volume:
908
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0908-OO05-21
Date:
January, 2005
File:
PDF, 110 KB
english, 2005
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