Experimental and Simulation Research on Influence of...

Experimental and Simulation Research on Influence of Temperature on Nano-Scratching Process of Silicon Wafer

Okabe, H., Tsumura, T., Shimizu, Jun, Zhou, Li Bo, Eda, Hiroshi
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Volume:
329
Year:
2007
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.329.379
File:
PDF, 1.04 MB
english, 2007
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