A Hybrid Dry-Wet Approach for Removal of a Dummy...

Solid State Phenomena 2012 / 4 Vol. 187

A Hybrid Dry-Wet Approach for Removal of a Dummy Polysilicon Gate in a Replacement Metal Gate Scheme

Hwang, Guang Yaw, Liao, J.H., Tzou, S.F., Lin, Mark, Yeh, Autumn, Lou, David, Chen, Eason, Huang, Weien, Kamarthy, Gowri, Xu, Kai Dong, Athayde, Amulya
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Volume:
187
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.187.57
Date:
April, 2012
File:
PDF, 865 KB
english, 2012
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