Crystalline Silicon Surface Passivation by Pecv-Deposited...

MRS Proceedings 2007 / 1 Vol. 989

Crystalline Silicon Surface Passivation by Pecv-Deposited Hydrogenated Amorphous Silicon Oxide Films [a-SiOx:H]

Mueller, Thomas, Duengen, Wolfgang, Job, Reinhart, Scherff, Maximilian, Fahrner, Wolfgang
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Volume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A05-02
Date:
January, 2007
File:
PDF, 176 KB
english, 2007
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