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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes
Pfusterschmied, Georg, Kucera, Martin, Ruiz-Diez, Victor, Bittner, Achim, Sanchez-Rojas, Jose Luis, Schmid, UlrichYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051058
File:
PDF, 1.30 MB
english, 2015