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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A 0.25mm3 Atomic Force Microscope on-a-chip
Sarkar, Neil, Strathearn, Duncan, Lee, Geoffrey, Olfat, Mahdi, Mansour, Raafat R.Year:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7051062
File:
PDF, 1.40 MB
english, 2015